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ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
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 MRAM
Magest S200 Magnetic Multilater
Cluster Tool
Magest S200 is a PVD system
for TMR multilayer films and magnetic shield. Multi-chamber
configuration is equipped and supports applications ranging
from R&D to mass-production.
Features
- Supports UHV (ultra-high vacuum) processes.
- Equip with dedicated MRAM cathode.
- Outstanding control and reproducibility with
ultra-thin films of 10 nm or less
- Outstanding magnetic anisotropy and coercive
force Minimized footprint
Applications
- MRAM R&D and mass-production
- TMR R&D and mass-production
- Magnetic shield R&D and mass-production
Specifications
| Loading/unloading chamber |
1 |
Wafer stocker type |
| Transfer chamber |
1 |
Double arm type |
| Pre-cleaning chamber |
1 |
LT-ICP etching |
| Deposition chambers |
4 |
Dedicated 3-source cathode,
dedicated Al cathodes |
| Oxidation chamber |
1 |
ISM radical oxidation |
| Deposition Film types |
Ta, NiFe, Pt, PtMn, CoFe, Ru,
Al, other |
For
more information |
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TEL
: 978-686-7550/ FAX : 978-689-6300 |
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