|
|
 |
|
|
 |
ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
|
|
 |
Implant
 IW-630
for Ultra Thin Wafer Handling
Thickness: 100µm ~ 50µm
Size: 125mm, 150mm, 200mm
Features
- For manufacturing Power Device (IGBT), Smart Cards, 3D stacked Devices, etc.
- 50µ thick handling without Support
- ESC Platen for Cooling
- Compatibel for both Thin Wafer and Standard SEMI Wafer
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
|
