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ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
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Other Metallization
 Entron
System for Aluminum Metallization
Process capability that spans over five
technology generations, ULVAC has
proven Aluminum metallization
on the versatile Entron System.
Features
- 200mm or 300mm wafer processing
- Space Saving Tandem (6 chambers) Platform
- Single Wafer Load/Unload Chambers with Degas and Cool
Capabilities
- PVD and CVD compatible configuration available
For
more information |
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TEL
: 978-686-7550/ FAX : 978-689-6300 |
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