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ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
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Ion Plating Systems
 IPB
Series Ion Plating Systems
The IPB Series is a lineup
of standard models ranging in size from compact to large.
The series contains a batch type, an inline type (multi-chamber)
and a continuous deposition type for long substrates. Computer
control makes automatic operation easy even for complex deposition
processes.
Features
- HCD evaporation source with high ionization rate
- High-speed deposition, high-volume processing
- High ionization rate enables films with minute, smooth surfaces.
- Heater for heating/degassing makes it easy to degas chamber and substrate.
- New process developed by ULVAC enables higher level of adhesion.
Applications
- Surface processing of drills, cutters and other cutting tools
- Improving abrasion resistance and release characteristic of die surfaces
- Ornamentation on products such as eyewear frames
- Corrosion resistance and ornamentation for automotive parts
- Improving desorption/adsorption characteristics of vacuum parts
Specifications
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IPB-300 |
IPB-450 |
| Processing zone (diameter x length (mm)) |
300 x 450 |
450 x 675 |
| Processing weight (kg) |
100 |
200 |
| Deposition speed (TiN, static (µm/min) |
0.5 |
| Reaction gases |
N2 C2H2 O2 |
| Heater |
Standard |
| Jigs |
3-shaft rotating jig |
Standard |
| 6-shaft rotating jig |
Standard |
| Other |
Optional |
| Utilities |
Installation space
(W x L x H; m) |
3.2 x 4.8 x 2.0 |
3.5 x 5.6 x 2.6 |
| Power (kVA) |
100 |
345W x 440L
(W x L:2levels) |
| Cooling water (m3/hr) |
2.8 |
4.2 |
| Ar gas (SCCM) |
30 |
50 |
Reaction gas
(N2; SCCM) |
300 |
500 |
For
more information |
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TEL
: 978-686-7550/ FAX : 978-689-6300 |
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