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Enviro Sale
 Enviro™
III Platform with Two Advantage™ Process Modules
This very lightly used Enviro System is in excellent
condition, ready for immediate delivery and priced to sell
quickly.
Features
- 200/300mm wafer compatible
- Equipment from end module (EFEM) with FOUP,
SMIF or open cassette
- Windows XP based system software with graphical
user interface
- Modular design to accept roll-up process modules
- Two Advantage™ process modules —
- Designed for challenging resist and residue removal applications
- Dual plasma source (microwave downstream and RF)
Quantity: 1
available
Condition: Very lightly used.
Price: Inquire.
Advantage™ III Processes
Post high dose implant strip.
Advantage™ Processes
Post via etch strip (no post solvent clean
required).
Pump Inventory Sale Items
Warranty on all New Old Stock Pumps is 90
days from date of shipment.
Dry Pumps
Diaphragm Type Dry Vacuum
Pump (DA & DAT Series)
| P/N |
Description |
Qty Available |
Sale Price |
| 1001727 |
PUMP DA-120S/230V |
2 |
$1,125 |
| 1004173 |
PUMP DA-240S/115V |
1 |
$1,385 |
| 1008057 |
PUMP DAT-100S/230V |
3 |
$605 |
Oil Sealed Pumps
Direct Drive Oil-Sealed
Rotary Pump (G Series) Standard Type
|
P/N |
Description |
Qty Available |
Sale Price |
| 1008161 |
PUMP G-50S/230V 50HZ |
2 |
$305 |
| 1008148 |
PUMP G-75D/115V |
2 |
$795 |
Direct Drive Oil-Sealed Rotary Pump (Gxx Series) w/Anti-Suckback
and Gas Ballast Valve
|
P/N |
Description |
Qty Available |
Sale Price |
| 1016574 |
PUMP GHD-30/115V (No
Gas Ballast Valve) |
4 |
$710 |
| 1022066 |
PUMP GHD-060 w/o MOTOR |
1 |
$310 |
| 1022067 |
PUMP GHD-120 w/o
MOTOR |
1 |
$315 |
| 1001757 |
PUMP GVD-135A/115V |
1 |
$1,305 |
Scroll Pumps
DVS-630
| P/N |
Description |
Qty Available |
Sale Price |
| 1025557 |
DVS-630 Scroll Pump, 100V |
1 |
$6,995 |
Oil Diffusion-Ejector Pump
PBL Series
|
P/N |
Description |
Qty Available |
Sale Price |
| 1010952 |
PUMP PBL-04 220V,
300l/s pumping speed |
1 |
$2,350 |
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