Thin Film Deposition
SME Series (Cluster Type)
World`s first, Low temperature PZT sputtering technology in mass production scale developed for piezoelectric MEMS device integrated on CMOS
- SME-200E is cluster type Sputtering system for research and development and production purpose.
- Substrate size up to φ200mm.
- Superior Cycle Performance
- Excellent Breakdown Voltage
- Low temperature process <500 C
- Process chamber up to seven process chambers can be equipped.
- Available for various application-specific process modules.
- Substrate heating mechanism, simultaneous deposition and revolved deposition are available.