|
|
 |
|
|
 |
ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
|
|
 |
Sputter Systems for LCD / Solar Cells
 SMD
Systems
The SMD Series are single-substrate
sputtering systems for deposition of films such as metal films
and ITO films. Ulvac has delivered a large number of these
systems, for use in a wide range of production environments.
Ulvac responds rapidly to feedback from production sites to
improve the reliability of these models.
Features
- Substrate-only transfer and side deposition
method enable low particle generation.
- Space-saving design
- Individual substrates can easily be managed
using parameters such as deposition conditions.
- Different cathodes are available for deposition
of different substances.
- Wide range of deposition processes are supported,
based on Ulvac's abundant experience and data.
Applications
- Color filters
- Thin-film transistors (TFTs)
Specifications
| |
SMD-750 |
SMD-950 |
SMD-1200BX |
| Substrate size (mm) |
600 X 720 |
750 X 950 |
1100 X 1250 |
| Chamber configuration |
1) Loading/ unloading chambers |
2
|
2
|
2
|
| 2) Heating chambers |
1
|
1
|
-
|
| 3) Transfer chambers |
1
|
1
|
1
|
| 4) Sputter chambers |
4
|
4
|
2
(Up to 3 cathodes)
|
| High vacuum evacuation system |
Cryopump |
Cryopump |
Cryopump |
| Substrate transfer system |
1-level arm |
1-level arm |
1-level arm |
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
|
