Sputter Systems for Display Panels / Solar Cells
 SDP
In-line Sputter Systems for Metal Bulk Films
The SDP Series are in-line sputtering systems for deposition of ITO films and other metal films.
They can be used to deposit films such as low-resistance ITO films, transparent conductive films, and multilayer chrome films for low-reflection black matrices.
Features
- Use of inclined transfer method makes handling
of large substrates easy.
- High productivity, with standard carrier throughput
of 60 seconds.
- Use of vacuum return method enables smaller
footprint.
- For deposition of ITO films for color filters,
return unit enables vacuum annealing, for high film quality.
- Uses bottom-mounted independent rack-and-pinion
transfer system, a highly reliable system with a well-established
track record.
- Enables simple maintenance.
Applications
- Transparent conducting films for PDPs or solar cells
- Color filters
Specifications
| |
SDP- s 1350
|
SDP- s 1550
|
| Effective area (mm2) |
1200 X1300
|
1500 X1800
|
| Number of substrates |
1 (1,250 x 1,110 mm)
|
2 (750 x 950 mm)
|
| Standard tact time |
50 sec/carrier
|
60 sec/carrier
|
| Heated deposition method |
Standard heated deposition/
non-heated deposition,
Inclining temperature deposition
+
vacuum annealing (option)
|
Standard heated deposition/
non-heated deposition,
Inclining temperature deposition
+
vacuum annealing (option)
|
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
|
