OLED Display Equipment 

Mini Lab for Materials Development Systems

A compact, low-cost system for development of organic materials. Merges a conventional compact evaporation system with organic EL technology, to enable deposition of organic materials and metals in a single chamber. Supports mask replacement, and can be connected to a glove box. These features enable a single system to perform processes ranging from deposition to organic material evaluations.

Features

• Evaporation chamber + loading chamber configuration. Enables deposition of organic materials and metals in single chamber.
• Comes with resistance evaporation source for organic materials/metals. Can be switched between common evaporation for each layer, or multilayer deposition of organic materials/metals. Supports mask deposition, comes with mask replacement mechanism.
• Comes with loading chamber, supports substrates of up to 100 mm in diameter. Loading chamber supports substrate transfer to/from glove box.
• Options include glove box, substrate heating mechanism and mask alignment mechanism.

Applications

• Organic materials development