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ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
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PDP Display Equipment
 ECH
In-line Evaporation Systems
The ECH Series are in-line
evaporation systems for deposition of MgO films. They contain
pierce type electronic-gun EB evaporation sources, and enable
stable deposition methods.
Features
- Enable uniform film thickness and film quality on large glass substrates.
- High throughput
- Stable movement over long periods
- Reduced maintenance and startup time
- Models with new vacuum return method are available
Applications
- Protective films for PDPs
Specifications
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ECH - 105 |
ECH - 135 |
ECH - 150 |
| Supported substrate size |
Up to 42 inches
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Up to 60 inches
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Up to 70 inches
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| Number of substrates |
1 (1,250 x 1,110 mm)
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2 (750 x 950 mm)
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2 (750 x 950 mm)
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| Tact time |
4 to 6 minutes
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2.5 to 6 minutes
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2.5 to 6 minutes
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| Substrate heating |
200°C
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| Continuous operation time |
1 week (about 144 hours)
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For
more information |
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TEL
: 978-686-7550/ FAX : 978-689-6300 |
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