CMD Series CVD System for LCD Panels

   ULVAC Technologies, Inc.
   401 Griffin Brook Drive
   Methuen, MA 01844

Tel: 978-686-7550
Fax: 978-689-6300

CVD Systems for LCD / Solar Cells

CMD Systems

The CMD Series are single-substrate CVD systems for deposition of silicon oxide and nitride films using SiH4 or TEOS. A high-frequency (27.12 MHz) power supply enables high-quality film deposition.

Features

Improvements in the reaction chamber structure and gas supply system enable long-term stable deposition rates for TEOS(SiO2) films.
Unit drive systems can operate at higher temperatures than conventional process temperatures, and a new vacuum transfer robot has been developed to enable a stable transfer system.
Use of a high-frequency (27.12 MHz) power supply creates high-density plasma, for a high deposition rate.
Individual substrates can easily be managed using parameters such as deposition conditions.
A heated reaction gas path enables evacuation of all equipment (up to discharging unit) in gas state. Elimination of piping traps reduces by-product adhesion and maintenance time.

Applications

Low-temperature P-Si, a-Si TFTs

Specifications

		CMD-450BHT	CMD-650HT	CMD-950
Substrate size (mm)		400X 500 Xt0.7	600 X 720 Xt0.7	730X920Xt0.7`0.5
Chamber configuration	1) Loading/ unloading chambers	2	2	2
	2) Heating chambers	1	1	1
	3) Reaction chambers	4 (3 if annealing chamber is mounted)	4 (3 if annealing chamber is mounted)	5 (4 if annealing chamber is mounted)
	4) Transfer chambers	1 (7-sided)	1 (7-sided)	1 (8-sided)
	5) Evacuation system Loading/ unloading chamber Reaction chambers	Rotary + mechanical boom Dry + mechanical boom	Rotary + mechanical boom Dry + mechanical boom	Rotary + mechanical boom Dry + mechanical boom
	6) Substrate transfer unit	Option	Option	Option
Productivity		65 seconds/substrate (for single-layer 300 nm SiN film under standard Ulvac conditions)	65 seconds/substrate (for single-layer 300 nm SiN film under standard Ulvac conditions)	75 seconds/substrate (for single-layer 300 nm SiN film under standard Ulvac conditions

For more information
Please Email Us
TEL : 978-686-7550/ FAX : 978-689-6300

^top