| LCD Display Equipment |
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Ulvac's has responded to increasing mother glass sizes by developing new-concept
systems for LCD Display manufacturing. The SMD-X Sputtering Systems support larger substrate sizes while remaining
compact and low-priced. |
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The SMD Series Systems are single-substrate
sputtering systems for deposition of films such as metal films
and ITO films.
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SDP
In-line Sputter Systems for Metal Bulk Films |
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The CMD Series are single-substrate
CVD systems for deposition of silicon oxide and nitride films
using SiH4 or TEOS. |
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| PDP Display Equipment |
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The ECH Series are in-line
evaporation systems for deposition of MgO films. They contain
pierce type electronic-gun EB evaporation sources, and enable
stable deposition methods. |
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The SDP Series are in-line sputtering systems for deposition of ITO films and other metal films. |
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| OLED Display Equipment |
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A complete lineup of Organic
EL Production Systems including
a research system for materials development, a cluster system
for low-volume production, and an in-line system for mass-production. |
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Mini Lab for Materials Development Systems A compact, low-cost system
for development of organic materials. |
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