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Web Coating Systems
 SPW
Sputter Web Coating Systems
SPW Series models support
a variety of applications including deposition of optical
thin films, electrode films and ornamental films. Several
features can be selected to match various applications, such
as ULVAC's original high-efficiency cathodes, oxide film deposition
cathodes and online film thickness monitors.
Features
- Stable substrate transfer when using resin films, metal foils or metal substrates.
- Wide range of pre-process mechanisms are available, including an ion bond mechanism for improved adhesion.
- Supports high-efficiency ULMG cathodes, and tungsten cathodes for high-rate oxide deposition
- Film thickness monitors for online measurement are available (transmission film thickness monitor, eddy current film thickness monitor, resistance value monitor, other)
Applications
- FPD reflection-reducing films/transparent
electrode films/shield films/high barrier films
- FPC electrode films
- Magnetic films/protective films for magnetic
recording media
- Other
Specifications
| |
SPW-025 |
SPW-069 |
SPW-130 |
| Chamber
material |
Stainless
steel or mild steel |
| Substrate
size (width) |
250mm |
690mm |
1300mm |
| MR temperature |
-20ºC
to +40ºC(standard) |
| Winding
rate |
0.5
to 20m/min |
| Film thickness
monitors |
Transmission
monitor, eddy current monitor,
contact-type resistance value monitor, other |
| Pre-/post-process
mechanisms |
Substrate heating, AC/DC/RF bombardment
mechanism,
ion gun mechanism |
| Main evacuation
systems |
Oil
diffusion pump, cryopump, turbomolecular pump, other |
For
more information |
|
TEL
: 978-686-7550/ FAX : 978-689-6300 |
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