Sputtering Systems 

SME Series Sputtering Systems

The SME Series is a series of space-saving, low-cost cluster-type sputtering systems ideal for SAW devices and compound semiconductors. The series lets you create a highly cost-effective line tailored to your application.

Features

• Can be used to manufacture gate electrodes, capacitors, resistors and a wide range of components.
• Highly-reproducible, high-quality deposition
• Choice of system configurations, with up to 3 sputter chambers
• Easy maintenance reduces down time.
• Outstanding film stress control and particle reduction