Evaporation Systems
 EX/EBX
Evaporation Systems
The EX/EBX Series are batch-type
high-vacuum evaporation systems created using the benefits
of ULVAC's many years of evaporation system technology and
experience. ULVAC has released many systems for opto-device
soldering and electrode multilayer deposition of compound
semiconductors. The EX/EBX Series includes models for a variety
of R&D or production applications.
Features
- EB evaporation sources/resistor heating evaporation
sources can be loaded.
- Vertical incidence for lift-off processes
- Supports through-the-wall configuration.
- Completely automatic operation
For
more information |
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TEL
: 978-686-7550/ FAX : 978-689-6300 |
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