Features
- Measures from atmospheric pressure to 5 x 10-2 Pa.
- Combined sensor and controller, thus reducing cables, saving space and energy.
- Operates with DC 24V input
- Pressure is 0 to 10V Log output
- LED Error verification for better visibility
- Atmospheric pressure adjustment and zero point adjustment can be done in one-touch.
- Sensor unit can be replaced easily.
- 2 set points output (SW1-1)
- RS232C/RS485 communication (only SW1-2)
- Conforms with CE
Applications
- Process control in low vacuum processes such as for semiconductor, optics and electronic parts manufacturing systems.
- Process control in low vacuum range processes for industrial equipment such as vacuum furnaces, etc.
- Process control for low vacuum system, which requires multiple process chambers, such as in-line sputtering and single wafer processing equipment.
