Features
- Wide-range Measurement – Wide pressure measuring range from atmospheric pressure to high vacuum range (10+5 to 5×10–8 Pa, 760 to 3.75×10–10 Torr, 1013 to 5×10–10 mbar). (when SPU and SAU are used together)
- Possible to Connect Gauge Heads with Different Measurement Ranges – With Multi Ionization Gauge (patent pending), a gauge head is selected depending on the usage.
- Precise Measurement of Atmospheric Pressure – Confirming atmospheric pressure easily and accurately (when SAU is used together)
- Low Environmental Burden – Capable of reducing the running costs as only failed gauge heads are replaced
- Improvement in Visibility – With highly visible LED for error verification
- Maintenance – Easy sensor head replacement
- Measured Value Output Signal – Pressure output in 0 to 10V (Log output)
- Control Output Signal – 3 setpoint output (only SH2-1)
- Serial Communication – RS232C / RS485 communication (only SH2-2)
- Applicable Standard – Conforms with rigorous CE standards
Applications
- Process control in high vacuum processes such photovoltaic production, FPD, semiconductor, optic and electronic parts manufacturing systems
- Ultimate pressure measurement in high vacuum manufacturing systems
- Pressure measurement in high and ultra high vacuum equipment
