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ULVAC Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844
Tel: 978-686-7550
Fax: 978-689-6300 |
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Used Equipment Sale
| Enviro-I: Single Chamber System |
USED ENVIRO SYSTEM FOR SALE
 The Enviro Single Chamber Advanced Strip System, with precise optical end-point detection, incorporates both downstream microwave and low-damage RIE modes to strip photoresist and can render all residues and sidewall polymers completely water-soluble. Designed for difficult applications, the Enviro Single Chamber Advanced Strip System is excellent for high-dose implant, multi-level metal, tough via veil, and poly/thin gate post-etch stripping. The Enviro Single Chamber Advanced Strip System is a single wafer (150-200mm) load-locked, MESC compatible tool with, multi-step processing capabilities. Windows-based software, off-line recipe selection, SECS/GEM communication standards, and extensive data logging are featured in the control system
CALL ULVAC TODAY 1-800-99 ULVAC (8-5822) |
Enviro-III: Dual Chambered System
USED ENVIRO SYSTEM FOR SALE
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The Enviro Dual Chamber Advanced Strip System, with precise optical end-point detection, incorporates both downstream microwave and low-damage RIE modes to strip photoresist and can render all residues and sidewall polymers completely water soluble. Designed for high throughput performance in difficult applications, the Enviro Dual Chamber Advanced Strip System is excellent for high-dose implant, multi-level metal, tough via veil, and poly/thin gate post-etch stripping. The Enviro Dual Chamber Advanced Strip System is a single wafer (200-300mm) load-locked, MESC compatible cluster tool with dual-chamber, parallel processing capabilities. Windows-based software, off-line recipe selection, SECS/GEM communication standards, and extensive data logging are featured in the control system.
CALL ULVAC TODAY 1-800-99 ULVAC (8-5822) |
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